摘要
针对球型电容位移传感器电容量变化微小,极板结构材质特殊,尺寸极其微小,通过电容传感器测量的变化量易受周围环境中寄生电容的干扰问题,提出了基于高精度的微弱电容检测电路系统的方法。该方法首先通过理论静电场出发,建立球型电容传感器在导体球内外表面的电容模型。然后在该模型基础上,对不同的待测目标进行电容信号的测量,并通过对测量结果的信号进行仿真分析。从仿真结果分析了微弱电容的大小,最后设计的微弱电容检测系统的检测范围可达0~1.5 p F,分辨率优于0.36 f F。从而使得电容传感器实现5 nm的位移分辨率,且通用性与稳定性均较好,实验也验证了该检测电路方案的有效性。
The ball type capacitive displacement sensor capacitance change is very small, special steel plate structure, the size is extremely small, the change of capacitance sensor for measuring the amount of interference problems of parasitic capacitance in the surrounding environment, put forward the design of the weak capacitance detection circuit system based on high precision. Firstly, through the theory of electrostatic field, a ball type capacitance sensor in the inside and outside surface of conductor ball capacitor model, and then on the basis of the model, measure the capacitance signal of the target is different, the simulation signal on the measurement results, the simulation results from the analysis of the weak capacitance, weak the final design of the capacitance detection system detection range up to 0- 1.5pF, the resolution is better than 0.36 fF, which makes the capacitance sensor displacement resolution of 5nm, and versatility, stability is good, the experiment also proves the validity of the test circuit scheme.
作者
陈莉
CHEN Li(Shaanxi Vocational College of National Defense Industry,Xi＇an 710302,China)
出处
《电子设计工程》
2018年第15期131-135,共5页
Electronic Design Engineering
关键词
电容传感器
微弱电容检测
高精度
capacitance sensor
weak capacitance detection
high precision
