摘要
扫描式的测量技术是目前微结构表面形貌测量的主流技术,但需要高精度的机械扫描、较长的测量时间。针对其问题,结合光场显微技术和傅里叶叠层显微技术,提出了一种分辨率增强的三维重构技术,通过在常规显微成像系统中加入光学编码元件,使用单次曝光而获得被测工件的光学切片序列,基于傅里叶叠层显微技术实现了对切片图像横向分辨率的增强,克服了光场成像技术中的分辨率损失。实验证明,提出的三维重构技术对于微结构表面加工过程的在线测量具有较好的应用前景。
Scanning based measurement techniques are the mainstream techniques for topography reconstruction of the micro structure surface.These techniques have strong dependence on high-precision mechanical scan,which means much time cost for the measurement process.By combining light field microscopy and Fourier Ptychography Microscopy（FPM）,a 3 Dreconstruction technique with enhanced resolution is proposed.An optical coding element is added in the conventional microscope optical path,and the optical slice images of the measured object can be obtained with a single shot.FPM algorithm realizes the enhancement of the lateral resolution of the slice images,which overcomes the resolution loss in the light field imaging technique.Experiments show that the 3 Dreconstruction technique proposed has a good prospect for the on-line measurement of micro structure surface processing.
作者
陈卓
胡摇
蒋晓黎
李腾飞
郝群
CHEN Zhuo;HU Yao;JIANG Xiaoli;LI Tengfei;HAO Qun(Beijing Key Lab.for Precision Optoelectronic Measurement Instrument and Technology,School of Optics and Photonics,Beijing Institute of Technology,Beijing 100081,China;Graduate School at Shenzhen,Tsinghua University,Shenzhen 518055,China)
出处
《光学技术》
CAS
CSCD
北大核心
2018年第4期385-390,共6页
Optical Technique
基金
国家重点基础研究发展计划(973计划)(2015CB059900)
深圳市基础研究(学科布局)项目(JCYJ20170412171011187)
关键词
微结构
光场
傅里叶叠层显微
分辨率增强
三维重构
micro structure
light field
Fourier Ptychography Microscopy
resolution enhancement
3D reconstruction
