摘要
随着声表面波微力传感的应用领域不断扩展,其测量性能的要求随之提高。针对高频信号稳定性、噪声干扰抑制以及测量灵敏度方面的问题,基于反馈原理设计声表面波振荡电路;针对高频信号难以测量的问题,采用混频检测法实现高频-中频信号的转化;针对混频后高频谐波分量干扰问题,基于Ⅱ型切比雪夫滤波器设计具有平稳增益、衰减带下降快的低通滤波电路;并搭建整形电路以供处理器对敏感参数进行识别。仿真分析表明,该研究优化了声表面波微力传感器的测量性能,对其应用领域的拓展具有一定的意义。
The requirements for measurement performance have increased with the continuous expansion of the application field of surface acoustic wave（SAW）micro-force sensors. SAW oscillator based on the principle of feedback is designed for stability of high-frequency signal stability,suppression of noise interference,sensitivity of measurement and so on. The mixed-frequency detection method is adopted to realize the conversion of the high-middle frequency signal for the issue that high-frequency signal is difficult to measure. A low-pass filter circuit with smooth gain and fast falling of attenuation band based on type Ⅱ Chebyshev filter is designed for the interference of high-frequency harmonic component after mixing. Finally,a shaping circuit is built for the processor to identify sensitive parameters. By the simulation analysis,results shows that this research optimizes the measurement performance of SAW micro-force sensor,it also has a certain significance for the expansion of its application field.
作者
李济同
李媛媛
卢文科
LI Jitong;LI Yuanyuan;LU Wenke(College of Electrical and Electronic Engineering,Shanghai University of Engineering Science,Shanghai 201620,China;Electronics and Information Engineering,Donghua University,Shanghai 201620,China)
出处
《传感技术学报》
CAS
CSCD
北大核心
2018年第7期1054-1060,共7页
Chinese Journal of Sensors and Actuators
基金
具有非线性输入环节系统的自适应递归输出反馈控制研究项目(61703269)
关键词
声表面波微力传感器
测量性能
反馈原理
混频检测
切比雪夫滤波器
SAW micro-force sensor
measurement performance
feedback principle
mixed-frequency detection
chebyshev filter
