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Reliability testing of a 3D encapsulated VHF MEMS resonator

Reliability testing of a 3D encapsulated VHF MEMS resonator
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摘要 The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitance of the printed circuit board(PCB), a negating capacitive compensation method was developed. The testing results implemented at 25 ℃ for 240 h for the long-term stability indicates that the resonant frequency variation remained within ±1 ppm and the noise floor derived from Allan Deviation was 26 ppb, which is competitive with the conventional quartz resonators. The resonant frequency fluctuation of 1.5 ppm was obtained during 200 temperature cycling between -40 and 85 ℃. The frequency stability of a three-dimensional(3D) vacuum encapsulated very high frequency(VHF)disk resonator is systematically investigated. For eliminating the parasitic effect caused by the parasitic capacitance of the printed circuit board(PCB), a negating capacitive compensation method was developed. The testing results implemented at 25 ℃ for 240 h for the long-term stability indicates that the resonant frequency variation remained within ±1 ppm and the noise floor derived from Allan Deviation was 26 ppb, which is competitive with the conventional quartz resonators. The resonant frequency fluctuation of 1.5 ppm was obtained during 200 temperature cycling between -40 and 85 ℃.
出处 《Journal of Semiconductors》 EI CAS CSCD 2018年第10期64-67,共4页 半导体学报(英文版)
基金 Project supported by the National Key Research and Development Program of China(No.2017YFB0405400) the National Natural Science Foundation of China(Nos.61234007,61734007,61404136,61704166) the Key Research Program of Frontier Science of CAS(No.QYZDY-SSW-JSC004)
关键词 3D encapsulation VHF disk resonator frequency stability parasitic effect 3D encapsulation VHF disk resonator frequency stability parasitic effect
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