摘要
提出了一种基于芯内双微孔复合结构的全光纤干涉传感器结构,建立了传感器反射光谱的理论模型,给出了反射光谱强度与微孔长度、孔内介质折射率、微孔端面反射与损耗系数以及光纤的特性参数间的关系,并模拟了传感器光谱对温度和折射率变化的响应特性.利用193 nm准分子激光器,在普通单模光纤上加工制作了具有复合腔结构的全光纤多参量传感器,进行了传感实验研究.结果表明,该传感器具有优于99%的温度、折射率线性响应度,对应两套温度和折射率灵敏度分别为-0.172 nm/℃,1050.700 nm/RIU和0.004 nm/℃,48.775 nm/RIU,不仅能够实现温度、折射率以及它们的区分测量,还能够应用于气体压力的测量,测量精度可达0.3 kPa.
A kind of dual micro-holes-based in-fiber Fabry-Perot interferometer sensor is proposed in this paper. The theoretical model of the reflection spectrum of proposed sensor is established based on the interference among four light beams,where both the relationships of the spectrum intensity with the length of micro-hole, refractive index（RI） of medium in cavity, transmission loss and reflection loss, and the characteristic parameters of fiber are demonstrated, and the temperature and RI responses of reflection spectra are also simulated. Through machining two micro-holes in singlemode fiber with 193 nm excimer laser, we fabricate the proposed fiber sensor which can be used for measuring the multi-physical quantities, and the corresponding experiments are demonstrated simultaneously. The results show that the sensor has better linear responses to temperature and RI change, and the corresponding linearity is superior to99%. Due to having two sets of different temperature and RI sensitivities（i.e.-0.172 nm/℃ and 1050.700 nm/RIU;0.004 nm/℃ and 48.775 nm/RIU） and better linearity, this kind of sensor can be used for measuring the temperature,the ambient RI and even the simultaneous discrimination of temperature and ambient RI. The RI and temperature resolutions are 1.0 x 10-5 RIU and 0.2 ℃, respectively. Furthermore, the sensor can also be used for sensing the gas pressure, and its measurement accuracy can reach to. 3 kPa. Owing to its high sensitivity, stability, small volume and easy fabrication, the sensor will be widely used in sensing technology.
作者
张伟
刘颖刚
张庭
刘鑫
傅海威
贾振安
Zhang Wei;Liu Ying-Gang;Zhang Ting;Liu Xin;Fu Hai-Wei;Jia Zhen-An(School of Environmental and Municipal Engineering,Xi＇an University of Architecture and Technology,Xi＇an 710055,China;Key Laboratory of Photoelectric Oil and Gas Logging and Testing,Ministry of Education,Xi＇an Shiyou University,Xi＇an 710065,China)
出处
《物理学报》
SCIE
EI
CAS
CSCD
北大核心
2018年第20期359-367,共9页
Acta Physica Sinica
基金
国家自然科学基金(批准号:61240028)
陕西省自然科学基础研究计划(批准号:2013JM8032)资助的课题~~
关键词
光纤传感器
法布里-珀罗干涉仪
温度
折射率
fiber sensor
Fabry-Perot interferometer
temperature
refractive index
