摘要
采用多弧离子镀工艺,以Al Ti合金靶和Zr单质靶为组合,通过改变AlTi靶电流,在氮化硅陶瓷刀具表面制备了一组(Ti,Al,Zr)N涂层。分别采用扫描电镜(SEM)、纳米压痕和纳米划痕研究AlTi靶电流对(Ti,Al,Zr)N涂层形貌和结构、硬度和涂层/氮化硅陶瓷刀具基体结合力的影响。实验结果表明,随着涂层沉积过程中Al Ti靶电流的增加,(Ti,Al,Zr)N涂层表面大颗粒数量先增加后减少;涂层厚度增加;涂层硬度和膜基结合力先升高后降低。最后,对涂层氮化硅陶瓷刀具进行高速干车削铸铁实验,研究Al Ti靶电流对(Ti,Al,Zr)N涂层氮化硅陶瓷刀具切削性能、磨损机理和切削寿命的影响,评估涂层刀具切削性能。
A series of(Ti, Al, Zr)N coatings were prepared on the surface of Si_3N_4 ceramic tools using multi-arc ion plating technology, which used Al Ti alloy target and pure Zr target by the means of changing the Al Ti target current. The effects of Al Ti alloy target current on surface and cross-section microstructure, hardness and coating/substrate adhesion of(Ti, Al, Zr)N coated Si_3N_4 ceramic tools were studied using SEM, nano-hardness test system and nano-scratch tester, respectively. The results show that the number of big particles on the coating surface first increases and then decreases; the thickness of the(Ti, Al, Zr)N coating increases with increasing of AlTi target current; the coating hardness and adhesion strength increases first and then decreases. Finally, the effects AlTi target current on cutting properties of(Ti, Al, Zr)N coated silicon nitride ceramic tools were investigated and the wear mechanisms were discussed when these tools were tested in turning cast iron in dry cutting condition.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2015年第S1期697-701,共5页
Rare Metal Materials and Engineering
基金
广东省引进领军人才专项资金(400120001)
广东省教育厅学科建设(501120021)
