摘要
介绍一个最佳掺杂含量表达式,应用此表达式分析计算了Al-Fe合金布线材料Fe掺杂最佳含量,定量计算的结果与实验数据基本符合。
Analysis of experimental Al-Fe alloy films with various doping levels is presented. The relationship among the physical property, crystal structure, preparation method and doping content is established to be a parabola equation. The extreme value of this equation determined the optimum doping content. The optimum doping content of Al-Fe alloy films determined by this quantitative calculation value is consistent with the experimental results. The theoretical quantitative calculation value of optimum doping content is within 1. 72%(at)-1. 82%(at), and the experimental results is 2at%. This theoretical expression is also appropriate to resolve the optimum doping content for other electric materials.
出处
《光电子技术》
CAS
2002年第3期168-170,共3页
Optoelectronic Technology
关键词
Al-Fe合金薄膜
晶体结构
制备方法
最佳掺杂含量
理论计算
Al-Fe alloy films, crystal structure, preparation method, optimum doping content,theoretical calculation
