摘要
还原炉倒棒一直是困扰各多晶硅厂的一个难题,长期倒棒现象将给生产设备造成损坏,甚至可能造成意外事故及人身伤害。通过对多晶硅生产中还原炉倒棒现象的总结分析,提出导致倒棒的主要原因和预防措施。
Reduction furnace rod has been plagued by the problem of polysilicon factory,Long rod phenomenon will cause damage to production equipment,May even cause accidents and personal injury.In this paper,the reduction of the reduction furnace in polysilicon production,The main causes and preventive measures of the pour rod are put forward.
作者
李鸿祥
杨丞杰
周立刚
Li Hong-Xiang;Yang cheng-jie;Zhou Li-gang(Kunming Metallurgical Research and new materials Limited by Share Ltd, Yunnan Qujing 655000, China;Yunnan Provincial Key Laboratory of optoelectronic materials manufacturing, Yunnan Qujing 655000, China)
出处
《云南化工》
CAS
2017年第4期104-106,共3页
Yunnan Chemical Technology
关键词
多晶硅
硅芯
沉积过程
倒棒
polysilicon
Silicon core
Deposition process
Fall stick
