摘要
设计了一种侧向场激励剪切波模式的薄膜体声波(FBAR)压力传感器,利用COMSOL Multiphysics有限元仿真软件构建了传感器的三维模型并添加了压电效应多物理场耦合,得到了FBAR压力传感器的位移分布以及谐振频率与响应电压的关系。进一步,模拟了FBAR压力传感器在生理盐水和血液两种液体环境下谐振频率的变化情况。在对FBAR压力传感器施加不同压力条件下,谐振频率逐渐发生改变。通过计算得到该FBAR压力传感器在生理盐水和血液中的压力敏感度分别为480、337. 5 Hz/kPa。验证了FBAR压力传感器在液体环境中的可用性,为应用于液体环境中的压力检测提供了可靠的理论基础。
This paper designed of a lateral shear wave excitation mode of thin film bulk acoustic wave(FBAR)pressure sensor,a 3D model of sensors was constructed using COMSOL Multiphysics finite element simulation software and the piezoelectric effect of multi field coupling was added,the displacement distribution of FBAR pressure sensor and the relationship between resonance frequency and response voltage were obtained.Furthermore,the resonant frequency of FBAR pressure sensor in two kinds of liquid environment,physiological saline and blood,was simulated.The resonant frequency changes gradually when different pressure was applied to the FBAR pressure sensor.The pressure sensitivity of the FBAR pressure sensor in physiological saline and blood can be calculated by 480 Hz/kPa and 337.5 Hz/kPa,respectively.The availability of FBAR pressure sensor in liquid environment is verified,which provides a reliable theoretical basis for pressure detection in liquid environment.
作者
马晓鑫
苏淑靖
耿子惠
吴永盛
MA Xiao-xin;SU Shu-jing;GENG Zi-hui;WU Yong-sheng(Key Laboratory for Electronic Measurement Technology,North University of China,Taiyuan 030051,China;Key Laboratory of Instrumentation Science&Dynamic Measurement of Ministry of Education,North University of China, Taiyuan 030051,China;College of Electrical Engineering and Information,Sichuan University,Chengdu 610065,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2018年第10期6-8,38,共4页
Instrument Technique and Sensor
基金
国家自然科学基金项目(51675493)
