摘要
随着空间光谱成像技术的发展,集成滤光片会成为未来空间光谱成像系统实现焦平面集成分光的关键器件。简介了光谱成像和集成滤光片技术,对拼接式集成滤光片进行了研制。分析了四通道红外拼接集成滤光片的设计、制备和测试,研制出长波红外拼接式集成滤光片,测试结果显示最小带宽达到402 nm(中心波长8.2μm),透射率均超过83%,最小拼缝宽度10μm,拼缝平行度达到2μm,通过了空间环境模拟试验考核,满足空间环境使用要求。
With the development of space spectrum-imaging technology,long stripe assembled filter(assembled with narrowband filters)will be the key device to realize focal plane beam splitting in the future space spectral imaging system.This paper introduced the development of spectral imaging and assembled filter technology,and the long stripe assembled filter was developed.The design and deposition of 4-channel IR long stripe assembled filter were researched.Test results show a minimum bandwidth of 402 nm at 8.2μm wavelength,and the average transmission rate was over 83%.Minus distance between narrowband filters was about 10μm and the seam depth of parallelism between narrowband filters was only 2μm.The assembled filter can withstand the test of space environment simulation and have been used in space now.
作者
李得天
王多书
王济洲
董茂进
李凯朋
LI Detian;WANG Duoshu;WANG Jizhou;DONG Maojin;LI Kaipeng(Science and Technology on Vacuum Technology and Physics Laboratory,Lanzhou Institute of Physics,Lanzhou 730000,China)
出处
《真空与低温》
2018年第6期374-379,共6页
Vacuum and Cryogenics
关键词
集成滤光片
光谱成像
窄带滤光片
long stripe assembled filter
spectral imaging
narrowbard filter
