摘要
研究AlON层厚度对TiAlN/AlON纳米多层涂层显微组织和性能影响.使用磁控溅射技术在高速工具钢(W6Mo5Gr4V2)上制备TiAlN/AlON纳米多层涂层,使用X射线衍射仪(XRD)、显微硬度计、通用表面测试仪表征和分析纳米多层涂层的组织和性能.结果表明:在TiAlN模板的作用下,非晶体的AlON转变为晶态,与TiAlN形成共格外延生长,使纳米多层涂层出现了超硬现象.当AlON层厚度为0.81nm时涂层硬度最高,达到3 769.6HV,比TiAlN单层涂层显微硬度提高了60.37%;之后随着AlON层厚度增加,硬度下降.当AlON层厚度为0.81nm时,涂层抗刮性和摩擦磨损性能也达到最好.
The effects of thicknesses of AlON layer on microstructures and properties of TiAlN/AlON nanomultilayers were studied.TiAlN/AlON nanomultilayers had been deposited on HSS(W6Mo5Gr4V2)by magnetron sputtering system.The microstructure and properties of these nanomultilayers were characterized by X-ray diffraction,vickers hardness tester and universal surface tester.The results show that under"template effect"of TiAlN,amorphous AlON has been crystallized and grow epitaxially with TiAlN.The superhardness effect could be generated in the region with sharp interface.When the thickness of AlON layer is 0.81nm,the nanomultilayer has highest hardness.The hardness of nanomultilayer is 3769.6HV and increases 60.37% than TiAlN coating.When the thickness of AlON layer is bigger than 0.81nm,the hardness decreases with thickness of AlON layer.The scratch resistance and abrasion resistance are best when the thickness of AlON layer is 0.81nm.
作者
阎红娟
刘峰斌
李喜朋
杨菲菲
YAN Hong-iuan;LIU Feng-bin;LI Xi-peng;YANG Fei-fei(School of Mechanical and Materials Engineering,North China University of Technology,Beijing 100144, China;Chinese Academy of Agricultural Engineering,Beijing 100121, China)
出处
《北京理工大学学报》
EI
CAS
CSCD
北大核心
2018年第12期1296-1301,共6页
Transactions of Beijing Institute of Technology
基金
国家自然科学基金资助项目(51575004)
北方工业大学毓优团队支持计划资助项目(18XN012)
北方工业大学毕业设计实培计划资助项目(XN1821)
