摘要
钨灯丝扫描电镜作为常规的大型精密分析仪器,在运行过程中常常会出现一些设备故障。因此需要做好扫描电镜日常的维护工作,延长部件的使用寿命,提升电镜的使用性能。以Tescan公司的Vega3台式扫描电子显微镜为例,主要介绍了该台钨灯丝扫描电镜电子枪系统、真空系统和EDS能谱等部件的保养措施,并介绍了电镜两例常见故障及排查处理方法。
As a high precision instrument,tungsten filament scanning electron microscope would occurred some equipment failures during operation.Therefore,routine maintenance is important to prolong the service life of components,which could improve the performance.Here,taking Tescan Vega3 as an example,this paper mainly discussed the operation and maintenance of the tungsten filament scanning electron microscope,including electron gun,vacuum system and EDS component.Two common faults and corresponding troubleshooting methods were also introduced briefly.
作者
陈静怡
CHEN Jing-yi(Experimental Center,Schools of Material Science and Engineering,Zhejiang University of Technology,Hangzhou 310014,China)
出处
《实验室科学》
2018年第6期168-170,共3页
Laboratory Science
基金
浙江省分析测试科技计划项目(项目编号:2016C37062)
关键词
钨灯丝
扫描电镜
维护
故障排查
tungsten filament
scanning electron microscope
maintenance
troubleshooting
