摘要
介绍了基于真空环境下位移传感器静态校准系统原理及其精度验证。传统的位移传感器校准装置和方法都在大气环境下进行,影响因素较多,测量精度也不易提高。该装置通过刚性传动装置,使真空中的位移与空气中的位移保持一致,由位移传感器测得空气中的位移值,由单频激光干涉仪通过迈克尔逊光学系统测得真空中的位移,两者之差,即是传感器的示值误差。最后,按照JJF 1305—2011的校准要求,对被测传感器进行了精度校准。
To introduce the principle of precision displacement sensors calibration system in vacuum environment and accuracy test and verify. All of traditional calibration device and method to precision displacement sensor s are calibrated in the air environment. To keep the sports device in the same displacement, the rigid transmission is used. The measurement in air environment can be got by precision displacement sensor, and the measurement in vacuum environment can be got bysingle-frequency laser interferometer in Michelson optical system. According to JJF 1305-2011,a serious experiment were done to the calibration system, then make a comparative analysis of the error structure and calculate the measurement uncertainty to ensure the accuracy of precision displacement sensor.
作者
叶颖谦
任国营
李伟仙
范乃胤
朱呈吉
董一凡
YE Ying-qian;REN Guo-ying;LI Wei-xian;FAN Nai-yin;ZHU Cheng-ji;DONG Yi-fan(Beijing Information Science Technology university, Beijing 100192, China;National Institute of Metrology, Beijing 100029, China;Henan Institute of Metrology, Zhengzhou, Henan 450000, China)
出处
《计量学报》
CSCD
北大核心
2018年第B12期62-65,共4页
Acta Metrologica Sinica
基金
国家重点研发计划(2018YFF0212702)
北京信息科技大学2018年度实培计划项目.
关键词
计量学
真空
位移传感器
校准
精度
metrology
vacuum
displacement sensor
calibration
precision
