摘要
激光加工技术是一种非接触式先进加工技术,主要利用激光与物质相互作用过程中产生的光物理、光化学反应对物质进行加工.现阶段,激光加工技术在航空航天、汽车制造、医疗卫生、仪器仪表和核工业等领域有着极为重要的应用价值.随着该技术工业化程度的不断加深,对其加工效率和加工质量提出了越来越高的要求.相比于使用成本较高的超短脉冲激光器实现这一目标,使用监测技术对加工过程进行观察和调控是更为合理的手段.传统的离线监测技术采用先加工后分析的方式对激光加工进程和加工缺陷进行监测,这种方法往往伴随着较差的时效性和较低的工作效率,在面对工况复杂多变、工件结构和组分多样化的实际工业生产时无法大规模应用.因此,在线监测技术作为一种必要的辅助手段,目前逐渐被广泛地应用到激光加工过程中.本文首先从时间尺度上分析了激光与物质相互作用的机理,阐述了不同脉宽激光加工时的一系列物理现象,明确了在线监测系统工作的切入点.针对国内外在激光加工过程中应用的在线监测技术进行了系统综述,详细分析了由声学传感器、光谱仪、光电二极管、视觉传感器和温度传感器等单一传感器构成的在线监测技术各自的工作原理、系统组成以及优缺点,同时阐述了这些传感器之间相互复合以及将传感器与新兴的人工智能技术结合的在线监测技术的应用现状,并基于现有在线监测技术的不足对其未来的发展趋势进行了展望.
Laser processing is an advanced non-contact processing technology.Photo-physical and photo-chemical reactions are mainly responsible for the processing of matter during the laser-matter interaction.Nowadays,laser processing has vast application values in many fields,such as aeronautics and astronautics,automobile manufacturing,health and medical community,instrument and apparatus and nuclear industry.With constantly deepening industrialization,higher demands for processing efficiency and quality are raised for laser processing.Comparing to high-cost ultra-short pulsed laser,it is more reasonable and affordable to apply monitoring technology to observe and regulate the laser processing,which can achieve similar outcomes.The conventional off-line monitoring technology analyzes the machining process and detects when the laser processing is finished,resulting in the poor timeliness and low working efficiency.This technology cannot be applied in mass industrial production when dealing with complex working condition as well as workpiece with diversified structures and components.Hence,in-situ monitoring technology has been widely employed as a necessary supplementary means for laser processing.In this paper,the interaction mechanism between laser and matter is firstly analyzed in the time scale.Various physical phenomena during the interaction between the laser with different pulse durations and matter are clarified,from which the pointcut for in-situ monitoring technology is specified.Systematic reviews on the applied in-situ monitoring technology during laser processing home and abroad are established.The working principle,system configuration as well as advantages and disadvantages of the in-situ monitoring technologies based on individual acoustic sensor,spectrometer,photodiode,visual sensor and temperature sensor are analyzed in detail.Meanwhile,the application status including the combination of these sensors and the combination of these sensor and artificial intelligence are elaborated.The development trend of the in-situ monitoring technology for laser processing based on the existing deficiencies is prospected.
作者
丁烨
薛遥
庞继红
杨立军
洪明辉
DING Ye;XUE Yao;PANG JiHong;YANG LiJun;HONG MingHui(Key Luhormory of Micro-systems and Microstructures Manufacturing,Ministry of Education,Harbin Institute of Technology,Harbin 150001,China;Department of Electrical and Computer Engineering,National University of Singapore,Singapore 117583,Singapore;Laser and Opto-electronic Intelligent Manufacturing Centre,Wenzhou University,Wenzhou 325000,China;College of Mechanical and Electronic Engineering,Wenzhou University,Wenzhou 325035,China)
出处
《中国科学：物理学、力学、天文学》
CSCD
北大核心
2019年第4期56-74,共19页
Scientia Sinica Physica,Mechanica & Astronomica
基金
国家重点研发计划(编号:2018YFB1107600)
国家自然科学基金(编号:71671130)
留学基金委员会资助项目
关键词
激光加工技术
在线监测
传感器
人工智能
laser processing technology
in-situ monitoring
sensor
artificial intelligence
