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基于黑磷烯/氧化石墨烯双介质层的柔性电容式压力传感器 被引量:8

Flexible Capacitive Pressure Sensor Based on Phosphene/Graphene Oxide Double Dielectric Layers
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摘要 设计并制备了由黑磷烯/氧化石墨烯双层材料为介质层的电容式柔性压力传感器,该传感器结构以ITO为电容上下极板,PET为柔性基底,并对该传感器进行了系统的性能测试与分析。着重研究了该传感器在不同压力量程内的灵敏度,进而分析了其温度漂移特性。测试结果表明,以黑磷烯/氧化石墨烯薄膜为双介质层的电容式柔性压力传感器在0~3.12 kPa压力量程内灵敏度可达到1.60 kPa^(-1)。同时,对该传感器和以氧化石墨烯薄膜为单介质层的传感器进行了弯曲应变性能的对照实验,可知具有双介质层的传感器结构能够显著提高传感器的输出特性。 This work presents a flexible capacitive pressure sensor based on phosphene/graphene oxide double dielectric layers. The sensor consists of ITO electric plates and flexible PET substrate,as well as the above double dielectric layers. The sensitivity of the sensor under different pressure ranges was systematically studied and the temperature drift characteristics were analyzed as well. The testing results show that the double dielectric layers-based sensor exhibit an outstanding sensitivity of 1.60 kPa -1 in the pressure range of 0~3.12 kPa. In the meanwhile,the contrast experiment was carried out to investigate the bending strain performance of sensors based on double dielectric layers and single graphene oxide dielectric layer,respectively. The contrastive results indicate the excellent output characteristics of the former device.
作者 聂萌 郭安琪 陈佳琦 徐峰 NIE Meng;GUO Anqi;CHEN Jiaqi;XU Feng(Key Laboratory of MEMS of Ministry of Education,Southeast University,Nanjing 210096,China)
出处 《传感技术学报》 CAS CSCD 北大核心 2019年第4期481-484,共4页 Chinese Journal of Sensors and Actuators
基金 国家自然科学基金项目(11774051 61574034 61474023) 中央高校基本科研业务费专项资金项目(2242018k1G012) 中国博士后基金项目(2014M550259 2015T80480)
关键词 柔性 电容式压力传感器 黑磷烯 氧化石墨烯 灵敏度 flexible capacitive pressure sensor phosphene graphene oxide high sensitivity
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  • 1杨敏,陈洪,李明海.柔性阵列式压力传感器的发展现状简介[J].航天器环境工程,2009,26(z1):112-115. 被引量:19
  • 2张鑫,郭清南,李学磊.压力传感器研究现状及发展趋势[J].电机电器技术,2004(4):28-29. 被引量:28
  • 3Pang C, Lee C, Suh K Y. Recent Advances in Flexible Sensors For Wearable and Implantable Devices [J]. Journal of Applied Polymer Science, 2013,130(3) : 1429-1441.
  • 4Kim B Y S,Rutka J T,Chan W C W. Nanomedicine[J]. New Eng- land Journal of Medicine, 2010,363 (25) :2434-2443.
  • 5Lee Y S, Wise K D. A Batch-Fabricated Silicon Capacitive Pres- sure Transducer with Low Temperature Sensitivity [J]. Electron Devices, IEEE Transactions on, 1982,29 ( 1 ) :42-48.
  • 6Summinto J, Yeh G, Spera T, et al. Silicon Diaphragm Capacitive Sensor for Pressure, Acceleration, Altitude Measurements [C]// IEEE Intl Conf on Solid-State Sensors and Actuators (Transduc- ers' 87), 1987 : 2-5.
  • 7Chavan A V, Wise K D. Batch-Processed Vacuum-Sealed Capaci- tive Pressure Sensors [J]. Journal of Microelectromechanical Sys- tems, 2001,10(4) : 580-588.
  • 8Haque R M, Wise K D. An Intraocular Pressure Sensor Based on a Glass Reflow Process [C ]//Solid-State Sensors, Actuators, and Microsystems Workshop. 2010: 49-52.
  • 9Chen P J, Rodger D C, Saati S, et al. Microfabricated Implantable Parylene-Based Wireless Passive Intraocular Pressure Sensors [ J ]. Journal of Microelectromechanical Systems, 2008, 17 (6) : 1342- 1351.
  • 10Chitnis G, Maleki T, Samuels B, et al. A Minimally Invasive Implantable Wireless Pressure Sensor for Continuous IOP Moni- toring [J]. IEEE Transactions on Biomedical Engineering, 2013, 60(1) :250-256.

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