摘要
主动隔振技术比被动隔振技术能够获得更大的隔振带宽及更小的振动传递率,主动隔振器广泛用于IC制造设备和高精密测量设备,其隔振性能直接影响到这些设备的加工或测量精度。速度传感器是主动隔振系统的重要组成部分,影响振动主动控制的精度和带宽。为了实现速度传感器的低频测振功能,采取速度传感器信号调理技术对低频进行拓展,基于滞后校正原理及其幅频特性,设计了速度传感器信号调理器,通过理论计算及仿真分析,有效实现了速度传感器的低频扩展。为超精密主动隔振系统提供了确实可行的速度传感器信号调理解决方案。
Active vibration isolation technology can obtain larger vibration isolation bandwidth and smaller vibration transmission rate than passive vibration isolation technology.Active vibration isolation is widely used in IC manufacturing equipment and high precision measurement equipment.Its vibration isolation performance directly affects the processing or measurement accuracy of these equipment.Velocity sensor is an important part of active vibration control,the accuracy and bandwidth of active vibration control are affected.In order to realize the low frequency vibration measurement function of speed sensor,the signal conditioning technology of speed sensor is adopted to expand the low frequency.Based on the principle of lag correction and its amplitude-frequency characteristics,the signal conditioning of speed sensor is designed.Through theoretical calculation and simulation analysis,the low-frequency expansion of speed sensor is effectively realized.It provides a feasible solution for signal adjustment of speed sensor for ultra-precision active isolation system.
作者
李俊丽
LI Junli(Shanghai Micro Electronics Equipment(GROUP) CO.,Ltd.,Shanghai 201203,China)
出处
《电子工业专用设备》
2019年第3期20-24,共5页
Equipment for Electronic Products Manufacturing
关键词
主动隔振装置
信号调理
速度传感器
低频扩展
Active vibration isolation
Signal conditioning
Speed sensor
Low-frequency expansion
