摘要
纳米时栅采用交变电场构建匀速参考系,实现空间到时间基准的溯源,提高了测量精度。提出一种基于交变电场的直线式位移时栅传感器。为进一步提升传感器测量精度并实现高精度测量,研究了电气参数对纳米时栅精度的影响,分析了传感单元之间的阻抗特性。针对影响电场分布的阻抗进行分析研究,首先建立传感器的电路模型,依据对电路方程的推导以及电气参数的仿真,分析了阻抗特性引入的误差规律。制作了传感器样机,并搭建实验平台进行了精度测试,验证了推导误差规律,同时借助时空转换原理修改激励信号参数,消除了阻抗特性带来的影响,最终传感器对极内精度达到±0.4μm。
A linear displacement time-grating sensor based on alternating electric field was proposed earlier.In order to further improve the accuracy of the sensor and achieve high precision measurement,the influence of electrical parameters on the accuracy of nanometer time-grating was explored,and the influence of impedance characteristics between sensing units on the accuracy of the sensor was analyzed.Firstly,the circuit model of the sensor was established.According to the deduction of the circuit equation and the simulation of the electrical parameters,the error law caused by the impedance characteristic was analyzed.A prototype of the sensor was made,and an experimental platform was built to test the accuracy of the sensor.The deduced error law was verified.At the same time,the method of modifying excitation signal parameters based on Space-time Conversion Principle was used to eliminate the error.The effect of impedance characteristic was also removed.Finally,the sensor’s accuracy over a single period achieved ±0.4 μm.
作者
孟瑶
周启武
郑方燕
刘小康
施海
MENG Yao;ZHOU Qiwu;ZHENG Fangyan;LIU Xiaokang;SHI Hai(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)
出处
《重庆理工大学学报（自然科学）》
CAS
北大核心
2019年第6期65-71,共7页
Journal of Chongqing University of Technology：Natural Science
基金
国家自然科学基金资助项目(51435002)
国家重大科研仪器研制项目(51827805)
重庆高校创新团队项目(CXTDX201601029)
关键词
纳米时栅
电气参数
阻抗特性
误差特性
nanometer time-grating
electric parameter
impedance characteristic
error characteristic
