摘要
围绕生产电子级多晶硅关键工艺控制各环节,研究了如何生产出高品质电子级多晶硅产品。
The production way of high quality electronic grade polysilicon is studied through discussion on all aspects of the critical process control for electronic grade polysilicon.
作者
马启坤
赵桂洁
张健雄
MA Qi-kun;ZHAO Gui-jie;ZHANG Jian-xiong(Kunming Metallurgical Research Institute,Kunming,Yunnan 650031,China;Yunnan Key Laboratory for New Technology of Beneficiation and Metallurgy,Kunming,Yunnan 650031,China;Yunnan Metallurgical Yunxin Silicon Material Co.,Ltd,Kunming,Yunnan 655011,China;Yunnan Province Key Enterprise Lab of Optoelectronic Silicon Materials Preparation Technology,Kunming,Yunnan 655011,China)
出处
《云南冶金》
2019年第4期76-78,共3页
Yunnan Metallurgy
关键词
电子级
多晶硅
生产工艺
electronic grade
polysilicon
production process
