摘要
直线或平面电机驱动的超精密运动系统加减速域跟踪误差对建立时间有重要影响,定量分析加减速域跟踪误差并建立解析模型,对减小建立时间有重要的工程与学术价值。针对工程实际中的数字控制系统,该文基于单质量块刚体和双质量块柔性体模型,在离散域建立跟踪误差与前馈控制器、反馈控制器和目标轨迹之间的解析模型,从物理层面深入分析超精密运动系统加减速域轨迹跟踪误差产生机理。定量分析表明,在给定的前馈控制器和反馈控制器作用下,时域上加减速域跟踪误差与目标轨迹特定阶次的导数近似成正比。在跟踪误差定量分析的基础上,提出一种前馈控制器参数整定方法。实验验证误差分析的正确性和前馈控制器参数整定方法的有效性。
The tracking errors during acceleration or deceleration phase in ultra-precision motion systems actuated by linear or planar motors have a great impact on settling time.Therefore, Quantitative analysis on tracking errors during acceleration or deceleration phase was of significant engineering and academic values. Based on rigid body model and double-mass-block model, this paper established the analytical model between tracking errors and feedforward controller, feedback controller and reference trajectory in discrete time domain, since most control systems in practice are digital control systems. Physical interpretation on the generation of tracking errors during acceleration or deceleration phase in ultra-precision motion systems is also presented. Research shows that the tracking errors are approximately proportional to a specific order derivative of reference trajectory under specific feedback and feedforward controllers. Based on the quantitative analysis, a feedforward tuning algorithm was proposed. The analysis on tracking errors and proposed tuning algorithm were validated by experiment.
作者
戴渌爻
李鑫
朱煜
张鸣
DAI Luyao;LI Xin;ZHU Yu;ZHANG Ming(State Key Laboratory of Tribology(Department of Mechanical Engineering, Tsinghua University),Haidian District, Beijing 100084, China)
出处
《中国电机工程学报》
EI
CSCD
北大核心
2019年第16期4910-4918,共9页
Proceedings of the CSEE
基金
国家重点研发计划项目(2017YFB0310603-02)~~
关键词
超精密运动系统
加减速域跟踪误差
定量分析
参数整定
ultra-precision motion systems
tracking errors
quantitative analysis
tuning algorithm
