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集成式MEMS-FAIMS分析器在线快速检测不同标号汽油 被引量:2

Rapid Identification and On-Site Detection of Different Labeled Gasoline by the Integrated MEMS-FAIMS
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摘要 车用汽油质量及泄漏问题严重影响人们的出行安全和生活环境。基于微电子机械系统(MEMS)工艺制备了高场不对称波形离子迁移谱(FAIMS)分析器,提出了基于FAIMS峰位置差异的不同标号汽油一维在线检测方法和基于离子迁移率非线性变化函数的二维在线检测方法。结果表明,分离电压范围1050~1110V为三种标号汽油的最佳一维鉴别条件。在该分离条件下,不同标号的汽油对应不同的峰位置。为进一步提高鉴别准确率,通过求解离子迁移率非线性变化函数二阶和四阶系数α2、α4,构建了不同标号汽油的二维识别方法。结果表明,不同标号汽油的离子峰在α2、α4张成的平面内分布于不同的区域。该研究为不同标号汽油的快速鉴别及现场检测提供了技术支持。 Gasoline quality and leakage seriously affect people's travel safety and living environment. The high-field asymmetric waveform ion mobility spectrometry (FAIMS)analyzer was fabricated based on the micro-electromechanical system (MEMS)process.A one-dimensional onsite detection method and a two-dimensional on-site detection method of different labeled gasolines were proposed,separately based on the difference of peak positions of FAIMS and the nonlinear change function of ion mobility.The results show that the separation voltage range of 1050-1110V is the optimal one-dimensional identification condition for three kinds of gasolines. The different labeled gasolines are corresponding to different peak positions under the separation condition.To further improve the identification accuracy,a two-dimensional identification method for different labeled gasolines was constructed by solving the second-order coefficientα2and fourth-order coefficientα4of the nonlinear change function of ion mobility.The results show that ion peaks of different labeled gasolines are distributed in different regions in the plane formed byα2andα4.This study provides technical support for the rapid identification and on-site detection of different labeled gasolines.
作者 王晗 徐青 李珂 陈池来 Wang Han;Xu Qing;Li Ke;Chen Chilai(State Key Laboratory of Transducer Technology,Hefei Institute of Intelligent Machines,ChineseAcademy of Sciences,Hefei 230031,China)
出处 《微纳电子技术》 北大核心 2019年第9期745-753,共9页 Micronanoelectronic Technology
基金 国家重点研发计划资助项目(2016YFC0201102) 国家自然科学基金资助项目(61871367) 中国科学院青年创新促进会资助项目(2013213)
关键词 高场不对称波形离子迁移谱(FAIMS) 微电子机械系统(MEMS) 在线检测 分析器 准确率 high-field asymmetric waveform ion mobility spectrometry (FAIMS) micro-electromechanical system (MEMS) on-site detection analyzer accuracy
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