摘要
以Al2O3陶瓷粉为原料,采用立体光固化成型技术制备微波介质谐振器和滤波器;采用扫描电子显微镜(SEM)表征材料的形貌,用阿基米德排水法对材料致密度进行了测试,用平行板谐振法对谐振器微波性能进行测试;通过调控陶瓷膏料中有机成分(反应单体、反应稀释剂、分散剂、光引发剂等)和无机成分(Al2O3及其掺杂)的比例,对打印参数和烧结曲线进行控制,实现了Al2O3谐振器成型精度的精确控制。结果表明:当激光器功率500mW,扫描速率2500mm/min,材料固含量60%(体积分数),脱脂温度600℃,排胶速率1℃/min,烧结温度1700℃时,可以实现97.5%的理论密度,相对介电常数9.8,Q·f值20184.25GHz(f=12.11GHz),满足实际应用需求。这为制备复杂结构的微波无源器件提供了新的潜在技术途径。
Microwave resonators and filters were prepared with dielectric Al2O3 by stereo lithography apparatus.The morphology, density and electrical properties of the samples were investigated by SEM, Archimedes drainage, and parallel plate resonator method.To accurately control the formation of Al2O3 resonator, we optimized the proportion of organic components (monomer, diluent, dispersant) and inorganic component (Al2O3 and dopant) in ceramic slurry, the printing parameters and sintering curve.The result shows that dense sintered samples up to 97.6% of the theoretical density of alumina could be obtained with laser power of 500 mW, scanning speed of 2500 mm/min, material solid content of 60%, degumming temperature of 600 ℃, heating rate of 1 ℃/ min and sintering temperature at 1700 ℃.The sample exhibits improved microwave dielectric properties of er = 9.8, Q·f = 20184.25 GHz (f = 12.11 GHz), which meets the practical application requirements.It provides a new potential technology for fabricating microwave passive devices with complex structures.
作者
楼熠辉
王飞
李攀郁
雷文
吕文中
LOU Yihui;WANG Fei;LI Panyu;LEI Wen;LYU Wenzhong(Key laboratory of Electronic Information Functional Materials (B), Huazhong University of Science and Technology, Wuhan 430074, China;School of Optics and Electronic Information, Huazhong University of Science and Technology, Wuhan 430074, China)
出处
《电子元件与材料》
CAS
CSCD
北大核心
2019年第10期44-48,共5页
Electronic Components And Materials
基金
国家自然科学基金(51772107)
