摘要
根据石英晶体压电效应及各向异性的特点,基于Comsol Multiphysics软件进行有限元仿真分析得到径向力作用时AT切石英晶体薄圆片内各点的应力分布特点。通过应力分布特点设计制作了在同一晶片上的集成式六电极石英谐振器,并基于此谐振器设计制作了水平姿态传感器的转换结构初样。根据共模抑制原理,通过差频处理来抑制温度以及其他相关因素的干扰。室温下,样品放置在倾斜台并连接至谐振电路,旋转倾斜台并测量样品在不同倾斜角度时谐振器的谐振频率。实验结果表明:样品在-90°~90°之间谐振频率变化稳定,输入-输出关系线性良好,可用于姿态检测的敏感元件。
According to the piezoelectric effect and anisotropy of quartz crystal,the stress distribution characteristics of the points in the AT-cut quartz crystal thin wafer under radial force are obtained by finite element simulation analysis based on Comsol Multiphysics software.An integrated six-electrode quartz resonator on the same wafer is designed and fabricated based on the stress distribution characteristics.Based on the resonator design,the initial structure of the horizontal attitude sensor is constructed.According to the principle of common mode rejection,temperature and interference of other related factors are suppressed by the difference frequency processing.At room temperature,place the initial sample on the tilting table and connect to the resonant circuit, rotate the tilting table and measure the resonant frequency of prototype sample at different tilt angles.The experimental results show that variation of the resonant frequency is stable between-90°and 90°,and the input-output relationship is linear.It can be used for attitude detection of sensitive element.
作者
佟盟
田文杰
陈福彬
冯洁
TONG Meng;TIAN Wenjie;CHEN Fubin;FENG Jie(Beijing Key Laboratory of Sensors,University of Information Science and Technology,Beijing 100101 ,China;School of Physics and Electronic Information, Yunnan Normal University,Kunming 650500,China)
出处
《传感器与微系统》
CSCD
2019年第10期61-63,共3页
Transducer and Microsystem Technologies
基金
北京市自然科学基金重点资助项目(KZ201511232037)
现代控制技术教育部重点实验室(北京信息科技大学)基金项目
关键词
石英晶体
有限元分析
应力分布
姿态检测
转换结构
quartz crystals
finite element analysis(FEA)
stress distribution
attitude detection
conversion structure
