摘要
提出了一种使用小尺寸MASK(光罩)的高精度曝光技术,能够实现1.5μm分辨率,几乎可以忽略的MASK成本。同时以曝光控制技术为基础,提出了一种快速进行TP/OL/CD精确测量的技术,为降低国产设备的测量使用成本提供了研究方向,同时提高了国产屏的性价比,可大幅降低单点测量时间和测量成本。
A high precision exposure technology using small size mask was proposed,which could not only reach the resolution of 1.5μm and had nearly no mask cost.Based on the control technology of exposure tool,a rapid TP/OL/CD measurement technology was also presented with less time consumption on one point measurement as well as more than twice the cost savings.Lower use cost represents an important development direction of domestic equipment,and it will also provide support for improving the cost performance of domestic panels.
作者
周畅
徐兵
朱岳彬
ZHOU Chang;XU Bing;ZHU Yuebin(Shanghai Micro Electronic Equipment (Group) Co.Ltd.,Shanghai 201203,CHN;School of Mechatronic Engineering and Automation,Shanghai University,Shanghai 200444,CHN)
出处
《光电子技术》
CAS
北大核心
2019年第3期210-214,共5页
Optoelectronic Technology
关键词
曝光
长寸
测量
光罩
精度
成本
exposure
total pitch(TP)
measurement
mask
accuracy
cost
