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复合板手机后盖磁控镀膜工艺稳定性控制技术探讨 被引量:2

Discussion on Technology Stability Control of Magnetron Coating on the Back Cover of Composite Plate Mobile Phone
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摘要 复合板手机后盖(一种PMMA+PC复合材料)磁控溅射镀膜主要是在真空环境下常温沉积非导材料和光学材料,通过每层不同膜厚材料的叠加来达到光学效果实现不同颜色,由于沉积的膜厚很厚,因此,控制沉积膜层的稳定性至关重要。真空常温下在复合板上沉积膜层,在复合板经过阴极位置会受沉积温度的影响释放部分水汽、复合板本身耐温性的影响、真空环境中灰尘和静电、工艺气体的隔离控制等都会对镀膜品质造成很大影响。 The magnetron sputtering coating on the back cover of composite panel mobile phone(a PMMA+PC composite)is mainly used to deposit non-conductive materials and optical materials at room temperature in vacuum environment.Optical effect can be achieved by superimposing different thickness materials on each layer to achieve different colors.Because the thickness of the deposited film is very thick,it is very important to control the stability of the deposited film.Deposition of film on composite plate at room temperature in vacuum will affect the quality of coating greatly,such as releasing part of water vapor,temperature resistance of composite plate itself,dust and static electricity in vacuum environment,isolation and control of process gas,etc.when the composite plate passes through the cathode position.
作者 任丹 刘月豹 REN Dan;LIU Yuebao(Anhui Fangxing Photoelectric New Material Science Technology Co.,Ltd.,Bengbu,233010)
出处 《玻璃》 2019年第9期43-47,共5页 Glass
关键词 复合板 手机后盖 磁控镀膜 水汽 温度 PC+PMMA mobile phone back cover magnetron coating steam temperature
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