摘要
采用磁控射频(RF)与磁控直流(DC)分别溅射金属铝靶,制备了润滑RF-Al-Ti/MoS2和DC-Al-Ti/MoS2复合涂层,并在真空条件下对制备涂层进行热处理以提高涂层耐磨损性能。结果表明,RF-Al-Ti/MoS2复合涂层中S/Mo原子比为1.55,有利于MoS2(002)面的形成,涂层平均摩擦系数低至0.1;由于RF-Al-Ti/MoS2复合涂层原子沉积效率更大,导致涂层结构致密,且RF-Al-Ti/MoS2复合涂层中Al原子含量高,有利于提升涂层抗氧化能力及耐磨损性能。对RF-Al-Ti/MoS2和DC-Al-Ti/MoS2复合涂层进行真空热处理,Ti和Al间扩散形成Ti-Al中间相进一步提升了涂层抗氧化性能,DC-Al-Ti/MoS2复合涂层磨痕形貌显示其耐磨损能力得到了明显提升;经500℃处理后,RF-Al-Ti/MoS2和DC-Al-Ti/MoS2复合涂层平均摩擦系数分别降低至0.08和0.07。总体上,射频溅射更有利于提升Al-Ti/MoS2复合涂层摩擦学性能。
The Al-Ti co-doped MoS2 composite coatings,deposited by RF/DC magnetron sputtering of MoS2,Al and Ti targets,were annealed in argon atmosphere.The influence of the doping mode of Al(RF or DC sputtering) and annealing on the lubrication behavior of Al-Ti/MoS2 coatings was investigated with X-ray diffraction,scanning electron microscopy,energy dispersive spectroscopy and mechanical probes.The results show that the Al-doping mode and annealing had a major impact.For instance,RF-Al-Ti/MoS2 coating,with an S/Mo atomic ratio of 1.55,considerably outperforms DC-Al-Ti/MoS2 coating,because of higher deposition-rate,more compactness,greater thickness,easier MoS2 grain formation,much lower friction-coefficient(~0.1),accompanied by stronger oxidation/wear resistances originated from higher Al-content.An annealing at 500°C decreased the average friction coefficients of both RF-and DC-Al-Ti/MoS2 coatings to 0.08 and 0.07,respectively.
作者
赵岚
曹明
林继兴
Zhao Lan;Cao Ming;Lin Jixing(Department of Material Engineering,Zhejiang Industry and Trade Polytechnic,Wenzhou 325003,China;College of Materials Science and Engineering,Jilin University,Changchun 130022,China)
出处
《真空科学与技术学报》
EI
CAS
CSCD
北大核心
2019年第10期901-906,共6页
Chinese Journal of Vacuum Science and Technology
基金
温州市“扶工扶农”活动项目和面向欠发达地区科研项目(20160030)
