摘要
制备了以掺钇氧化锆(YSZ)为固态电解质,LaFeO3为敏感电极的混成电势乙醇气体传感器。LaFeO3通过溶胶-凝胶法制备并用XRD分析。利用场发射电子扫描显微镜对YSZ基底和敏感电极表面形貌进行了表征。测试结果表明制备的传感器在350℃的工作条件下对乙醇有良好的响应(400×10^-6乙醇时135 mV)和较快的响应时间(50×10^-6乙醇时14 s)。测试结果还表明此传感器有良好的可重复性和选择性。
Mixed potential type ethanol gas sensor using Yttria-Stabilized Zirconia(YSZ)as solid electrolyte and LaFeO3 as sensitive material was fabricated and characterized.LaFeO3 was prepared by a sol-gel method and characterized by XRD.YSZ substrate and sensitive electrode were characterized using field emission scanning electron microscope.The measurement results show that the presented sensor exhibits a high sensitivity(135 mV to 400×10^-6 ethanol)and fast response time(14 s to 50×10^-6 ethanol)at 350℃.The results also demonstrate good repeatability and selectivity of the fabricated sensor.
作者
洪浩
孙剑文
吴次南
刘泽文
HONG Hao;SUN Jianwen;WU Cinan;LIU Zewen(College of Big Data and Information Engineering,Guizhou University,Guiyang 550025,China;Department of Microelectronics,Delft University of Technology,the Netherlands and China Research Institute,Delft University of Technology,Beijing 100083,China;Institute of Microelectronics,Tsinghua University,Beijing 100084,China)
出处
《传感技术学报》
CAS
CSCD
北大核心
2019年第11期1608-1612,共5页
Chinese Journal of Sensors and Actuators
基金
国家重点研发计划项目(2018YFB2002801)
