摘要
四氟化硅是一种有机硅化合物合成材料,被广泛应用于半导体行业,其需求量日益扩大,对其纯度要求也越来越苛刻。本文介绍了四氟化硅常用制备方法及其优缺点,列举了四氟化硅的纯化方法。在实际生产过程中,企业需根据自身实际生产情况选择合理的生产路线,结合制备工艺中杂质种类,选择合适纯化方法,获得高纯四氟化硅产品。
Silicon tetrafluoride is a synthetic material of organosilicon compounds.It is widely used in the semiconductor industry.Its demand extends increasingly and its purity requirements are becoming more stringent.This paper introduces the common preparation methods of silicon tetrafluoride and its advantages and disadvantages,and enumerates the purification methods of silicon tetrafluoride.In the actual production process,the enterprise should choose a reasonable production route according to its actual production situation,and combines select a suitable purification method based on the impurity types in the preparation process and obtain high-purity silicon tetrafluoride products.
作者
缪光武
张金柯
白占旗
何双材
曾群
胡欣
刘武灿
MIAO Guang-wu;ZHANG Jin-ke;BAI Zhan-qi;HE Shuang-cai;ZENG Qun;HU Xin;LIU Wu-can(Zhejiang Research Institute of Chemical Industry Co.,Ltd.,Hangzhou,Zhejiang 310023,China)
出处
《浙江化工》
CAS
2019年第11期1-5,共5页
Zhejiang Chemical Industry
关键词
四氟化硅
制备
纯化
电子气体
silicon tetrafluoride
preparation
purification
electron gas
