摘要
为研究保持环超声振动对抛光试件和抛光垫间流场性能的影响,利用COMSOL Multiphysics软件分别针对实体研抛盘和有孔抛光垫,对研抛区流体进行了有限元建模与仿真,分析了试件保持环超声振动的频率、振幅对研抛区流体的速度、压力及气含率分布的影响规律。仿真结果表明:超声振动会使流体的速度与压力剧烈变化,在保持环振子下方产生极强的微射流,而试件下方的流速变化较为平缓;随着超声频率或振幅的增加,流体内的最大速度、最大压力以及最大气含率线性增加。和实体研抛盘相比,使用打孔抛光垫后,抛光试件下方流体最大速度减小数十倍,变化更加平稳,而最大压力却增大了百余倍,试件底面处的最大气含率也有所增大,空化效应更加强烈,更有利于在抛光过程中生成化学反应自由基与提高材料去除率。
To explore the influence of the reciprocating ultrasonic vibration of a workpiece retainer on the hydrodynamic performance of the slurry fluid under the workpiece,we used COMSOL Multiphysics software to perform a finite element modeling and simulation of areas polished by a solid dish and a perforated polishing pad,respectively.We then analyzed the influence of the frequency and amplitude of the ultrasonic vibration of the workpiece retainer on the velocity,pressure,and gas-content distribution of the fluid in the polishing area.The simulation results show that ultrasonic vibration cause drastic changes in the fluid velocity and pressure and generate a strong micro-jet under the retainer,whereas the change in the flow velocity under the workpiece is gentle.With increases in the ultrasonic frequency or amplitude,the maximum velocity,pressure,and gas content in the fluid increase linearly.Compared to a solid polishing dish,when using a perforated polishing pad,the maximum fluid velocity under the polished specimen is reduced dozens of times,the variation is more stable,and the maximum pressure is increased more than 100-fold.In addition,the maximum gas content on the bottom of the test piece is increased and the cavitation effect is more intense,which favor the generation of chemical-reaction radicals and an improved material removal rate during the polishing process.
作者
翟文杰
翟权
ZHAI Wenjie;ZHAI Quan(School of Mechatronic Engineering,Harbin Institute of Technology,Harbin 150001,China)
出处
《哈尔滨工程大学学报》
EI
CAS
CSCD
北大核心
2019年第12期2050-2056,共7页
Journal of Harbin Engineering University
基金
国家自然科学基金项目(51475119)
关键词
化学机械研抛
超声振动
流场
动力学仿真
空化效应
微射流
气含率
反应自由基
chemical mechanical polishing
ultrasonic vibration
flow field
dynamics simulation
cavitation effect
micro-jet
gas content
reaction radicals
