摘要
针对光学高精度角度测量技术的需求,基于激光自混合干涉技术提出一种高精度角度测量方法。建立了激光自混合干涉技术高精度测量角度的系统模型,利用干涉条纹计数法分析出目标物体具有角度变化时,外腔长度产生的变化量,并通过激光三角法测量原理计算出目标物体旋转的角度,从而构建出精确的角度测量系统。实验结果表明:该测量系统在±0.4°角度范围内测量精度可达(±3.1×10-3)°,具有精度高、速度快等显著优势,是对现有高精度角度测量技术的一种有益补充。
Aiming at the requirements of optical high-precision angle measurement technology,a high-precision angle measurement method based on laser self-mixing interference technology is proposed.A system model of high-precision measurement angle of laser self-mixing interference technique is established.The interference fringe counting method is used to analyze the variation of the length of the outer cavity when the target object has an angular change.According to the laser triangulation measurement principle,the angle of rotation of the target object is obtained.Thereby constructing an accurate angle measuring system.The experimental results show that the measurement system can achieve measurement accuracy of(±3.1×10-3)°within±0.4°angle range,which has obvious advantages such as high precision and high speed.It is a useful supplement to the existing high-precision angle measurement technology.
作者
朱均超
许虹虹
张海彤
左铭
赵岩
ZHU Jun-chao;XU Hong-hong;ZHANG Hai-tong;ZUO Ming;ZHAO Yan(Engineering Research Center of Optoelectronic Devices&Communication Technology,Ministry of Education,Tianjin University of Technology,Tianjin Key Laboratory for Control Theory and Applications in Complicated System,Tianjin 300384,China)
出处
《激光与红外》
CAS
CSCD
北大核心
2020年第1期37-41,共5页
Laser & Infrared
基金
国家自然科学基金项目(No.61803281)
天津市自然科学基金项目(No.18JCQNJC75500)
天津市教委科研计划项目(No.2017KJ253)资助。
关键词
激光自混合干涉
高精度角度测量
干涉条纹计数法
激光三角法
laser self-mixing interference
high-precision angle measurement
interference fringe counting method
laser triangulation
