摘要
硬脆材料微加工中常存在材料易崩裂、刀具磨损严重、加工效率低等不足,引入超短脉冲激光微加工技术,通过光-热-力效应引发材料去除,可有效克服上述加工难题。以羟基磷灰石生物陶瓷、氧化铝工程陶瓷、单晶硅三种典型硬脆材料为加工对象,探索基于皮秒激光的微加工工艺方法,尝试利用激光干切、液体辅助、化学辅助等不同手段,完成微槽、微孔等结构的高质量加工,并分析微加工表面特征形貌,评估工艺方法可行性。
Shortcomings such as material easy to crack,obvious tool wear and low processing efficiency usually happen in micro-machining of hard-brittle materials,and the introduction of ultra-short pulse laser micro-machining technology to cause material removal through light-thermal-force effect can effectively overcome the mentioned processing problems.Using hydroxyapatite bioceramics,alumina engineering ceramics and single crystal silicon as three typical hard-brittle materials as processing objects,the article explores the micro-machining method based on picosecond lasers and try to use laser dry cutting,liquid assistance and chemical assistance means to complete high quality machining of micro-grooves,micro-holes and other structures,and then the micro-machined surface features are analyzed to evaluate the feasibility of the process.
作者
朱浩
张朝阳
徐坤
戴学仁
赵斗艳
ZHU Hao;ZHANG Zhaoyang;XU Kun;DAI Xueren;ZHAO Douyan(Institute of Laser Technology,School of Mechanical Engineering,Jiangsu University,Zhenjiang 212013,China)
出处
《电加工与模具》
2020年第1期43-46,共4页
Electromachining & Mould
基金
江苏省自然科学基金-青年基金项目(BK20180875)
国家自然科学基金面上项目(51675242)
中国博士后科学基金特别资助项目(2019T120392)
中国博士后科学基金面上项目(2018M640461)
江苏大学高级人才科研启动金资助项目(18JDG011)
关键词
皮秒激光
硬脆材料
微结构
picosecond laser
hard-brittle material
micro-structure
