摘要
表面粗糙度对机件的性能有直接影响,为了实现对其髙精度、高分辨力的非接触测量,提出了全光纤声光调制的粗糙度相关测量技术。应用外差激光多普勒测量原理,提高了测量的准确性。单模光纤作为传输介质并在测量系统中采用多种耦合技术,保证了传输的可靠性。通过理论推导,建立数学模型。对接收信号采取互相关函数累计减少误差的处理方法,提高了输出信噪比和测量精度,通过对比测量得到相对误差为0.0688%的测量结果,实现了纳米级测量。结果表明,系统的不确定度小于0.1%,与传统的粗糙度测量方法相比,解决了诸多问题。
Surface roughness has a direct impact on the performance of machine.In order to realize non-contact measurement with high precision and high resolution,an all-fiber acoustooptic modulation roughness correlation meas・urement technology is proposed.The principle of heterodyne laser Doppler measurement is applied to improve the accuracy of measurement.Single-mode optical fibers are used as transmission media and a variety of coupling technol o・gies are adopted in measurement system to ensure the reliability of transmission.Through theoretical deduction,the mathematical model is established.The cross-correlation function is used to reduce the error accumulatively,which improves the output signal-to-noise ratio and measurement accuracy.The relative error is 0.0688%by comparing measurements,and nanometer-scale measurement is realized.The results show that the uncertainty of the system is less than 0.1%compared with traditional roughness measurement method,and many problems are solved.
作者
张守宇
王辉林
秦正健
宋华峣
曹泉泉
ZHANG Shouyu;WANG Huilin;QIN Zhengjian;SONG Huayao;CAO Quanquan(Department of Instrument Science and Technology,Shandong University of Technology,Zibo 255049,China)
出处
《激光杂志》
北大核心
2020年第2期25-28,共4页
Laser Journal
关键词
光纤
激光技术
声光调制
互相关处理
不确定度
optical fiber
laser technology
acousto-optic modulation
cross-correlation processing
uncertainty
