摘要
环形微机电陀螺的敏感结构误差会导致工作模态频率分裂和振动轴向偏转,是影响性能的主要因素之一。质量分布误差中影响最大的是4次谐波分量。为了确定这种缺陷所在的角度,理论分析了环结构在不同角度的检测电极处的频率响应特性,提出了一种通过频率响应参数计算环形结构工作模态本征轴向的方法。为了检验该方法的准确度,采用有限元方法对具有结构缺陷的环结构进行了谐响应分析,结果表明该方法确定的本征轴向相对误差约为2%。
Structural imperfections in ring micro-electromechanical system(MEMS)gyroscopes lead to frequency splitting of the operating mode and axial deflection of the vibrations,which are some of the main factors affecting the performance.The mass distribution imperfections most strongly influence the fourth harmonic component.The angular position of this defect is determined from the frequency response characteristics at the detection electrodes of the ring structure which were analyzed theoretically in this study for various defect angles.A method is also given to calculate the intrinsic axial direction of the ring structure operating mode from the frequency response parameters.The accuracy of this method was verified against finite element calculations of the harmonic response of the ring structure with structural defects with the results showing that the intrinsic axial relative error is about 2%.
作者
王锦
陈志勇
张嵘
WANG Jin;CHEN Zhiyong;ZHANG Rong(Department of Precision Instruments,Tsinghua University,Beijing 100084,China)
出处
《清华大学学报（自然科学版）》
EI
CAS
CSCD
北大核心
2020年第1期76-81,共6页
Journal of Tsinghua University(Science and Technology)
基金
国家“十五”计划(41417010303)
关键词
环形陀螺
本征轴
结构缺陷
微机电系统
ring gyroscope
intrinsic axis
structure defect
micro-electromechanical system
