摘要
首先介绍了含氟电子气体研究现状,然后分析了含氟电子气体相关的标准情况及发展趋势。
The research status of fluorinated electronic gases is introduced firstly,then the current status and development trend of related standards of fluorinated electronic gases are analyzed in this article.
作者
徐娇
张建君
鬲春利
方小青
杜肖宾
史婉君
XU Jiao;ZHANG Jianjun;GE Chunli;FANG Xiaoqing;DU Xiaobin;SHI Wanjun(Zhejiang Research Institute of Chemical Industry Co.,Ltd.,Hangzhou 310023,China)
出处
《低温与特气》
CAS
2020年第1期6-11,共6页
Low Temperature and Specialty Gases
关键词
含氟电子气体
标准
发展趋势
fluorinated electronic gases
standards
development trend
