摘要
微射流水导激光加工属于一种多能场复合激光加工技术.该技术利用加工激光耦合稳定压力微射流,改变激光能量分布为平顶高斯光束,并对加工断面进行冷却、冲刷.稳定的小流量压力去离子水射流导引激光柔性延伸加工焦点,改善加工激光能量分布的同时实现去屑、冷却,使得其轴向加工质量、精度得到提高,并提高激光轴向加工能力.本文介绍并阐述了该加工装置及设备研发的若干关键因素:激光全反射入射角度的选择、光束质量、模式、聚焦位置及激光与水射流的耦合精度.对比了该技术与超短脉冲激光(飞秒激光)的加工特点.阐述了微射流水导激光适当控制激光加工热量,控制激光加工方向,适用于高质量大深径比(约10-100)的深孔、槽、缝的场合以及一些低k绝缘材质,硬质合金、SiC、GaAs、聚晶金刚石等材质的高附加值对象场合.
Laser microjet is a kind of compound energy field processing,which combined laser with microjet processing as well.While processing laser couples with stabilize pressure microjet and transfers internal total reflection until it arrives at workpieces surface,and changes the Gauss energy distribution to flat-topped laser beam,as well as cools and brushes the processing cross section.The stable low flow pressure deionized water jet waveguides cutting laser flexible extension processing focus,to improve the laser energy distribution while removing chips and cooling and enhance the axial processing quality and accuracy,and improves the laser axial processing ability.Talking about the research development of LMJ and the key technologies of LMJ equipment which including the angle of laser total reflect inner microjet,laser quality,laser transverse model,focal points,coupling precision of laser with nozzle and the stable work distance of microjet etc.At the same time,this processing method is introduced which is suitable for controlling the heat of laser processing,enhancing the direction of laser processing,high quality deep holes,slot and seam with large aspect ratio(about 10-100)as well.The object of the processing method gradually includes high value-added occasions of insulating materials,low-k materials,semiconductor,cemented carbide,such as Si C,Ga As,polycrystalline diamond and other photoelectrical materials.
作者
卢希钊
江开勇
LU XiZhao;JIANG KaiYong(College of Mechanical Engineering and Automation,Huaqiao University,Xiamen 361021,China;Department of Electronic Science,Xiamen University,Xiamen 361005,China;Fujian Key Laboratory of Special Energy Manufacturing,Huaqiao University,Xiamen 361021,China)
出处
《中国科学：物理学、力学、天文学》
CSCD
北大核心
2020年第3期26-39,共14页
Scientia Sinica Physica,Mechanica & Astronomica
基金
国家自然科学基金(编号:51575198)
福建省重点实验室开放基金(编号:2016JZA002)资助项目
