摘要
复合薄膜因其可具有比单组份薄膜更加优异的性能而得到广泛的应用。通过以膜层的防护、催化、电学、光学以及力学性能等复合思想为切入点,阐述了通过膜层的复合掺杂旨在增强合金的抗腐蚀性,提高润滑摩擦性能,改善膜层的导电性能以及进行光学薄膜折射率和光谱吸收的调控,增强膜层的硬度及拉伸强度等机械性能的方法。对国内外的相关前沿成果进行简要介绍,并对复合薄膜的未来发展进行展望,为相关领域的研究提供参考。
Composite films are widely applied for their superior properties compared with the single component films.Taking the composite thoughts of protective,catalytic,electrical,optical along with mechanical properties as the points of penetration,the methods of mechanical properties were expounded through the membrane layer composite doping in order to enhance the corrosion resistance of alloy,promote the lubrication friction property,improve the conductivity of membrane layer,control the refractive index of optical thin films and the spectral absorption,as well as increase the hardness,tensile strength.The related frontier achievements at home and abroad are briefly introduced,and the future development of composite films is prospected,which provide reference for the research in related fields.
作者
师云云
徐均琪
苏俊宏
SHI Yunyun;XU Junqi;SU Junhong(Shaanxi Province Thin Films Technology and Optical Test Open Key Laboratory,Xi’an Technological University,Xi’an 710021,China)
出处
《应用光学》
CAS
CSCD
北大核心
2020年第2期405-420,共16页
Journal of Applied Optics
基金
陕西省科技计划项目(2016KW036,2018KWZ-02)。
关键词
复合薄膜
防护性能
电学性能
催化性能
光学性能
机械性能
composite thin films
protective properties
electrical properties
catalytic properties
optical properties
mechanical properties
