摘要
氟镓酸盐玻璃是一种性能良好的红外光窗材料。为了提升窗口观测、探测及防护性能,在氟镓酸盐基底上设计和制备了0.4~0.9 μm、1.064 μm、3.7~4.8 μm三波段复合增透保护膜。根据光学性能及环境稳定性要求选择薄膜材料并对膜系进行了设计,然后利用电子束蒸发方法对多层膜进行了制备。测量结果表明,2.9 μm处的水吸收峰拉低了中红外波段的透过率。通过改进工艺及后处理等途径提高了膜层致密度,有效抑制了膜层的水吸收。利用沸水浸泡法对镀膜元件的环境稳定性进行了实验验证。结果表明,经过离子束辅助沉积及退火处理的薄膜样品具有较好的光学性能和环境适应性。
Fluorogallate glass is an infrared window material with good performance.In order to improve the window observation,detection and protection performance,three-band(0.4--0.9μm,1.064μm and 3.7--4.8μm)composite anti-reflection protective films are designed and prepared on the fluorogallate substrate.According to the requirements of optical performance and environmental stability,the thin-film materials are selected and the membrane system is designed,and then the multilayer film is prepared by the electron beam evaporation method.The measurement results show that the water absorption peak at 2.9μm lowers the transmittance in the mid-infrared waveband.The film density is improved by improving the process and post-treatment and other ways,and the water absorption of the film layer is effectively suppressed.The environmental stability of the coated components is verified by the boiling-water immersion method.The results show that the thin-film samples processed by ion-assisted deposition and annealing have better optical properties and environmental adaptability.
作者
邵淑英
郭猛
易葵
姜雄伟
邵建达
SHAO Shu-ying;GUO Meng;YI Kui;JIANG Xiong-wei;SHAO Jian-da(Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China)
出处
《红外》
CAS
2020年第1期1-6,共6页
Infrared
关键词
氟镓酸盐玻璃
红外窗口
三波段
增透保护膜
fluorogallate glass
infrared window
three-band
anti-reflection protective film
