摘要
通过设计优化的环形上电极结构和普遍采用的栅条形上电极结构,进行理论研究和对比测试分析,并采用Looyenga及Dubinin等方程进行计算研究。为了扩大孔隙率,以提高水分子通过上电极的效率,从而缩短电容式湿度传感器的响应时间,对上电极多孔结构进行了优化研究,研究表明优化设计的环形上电极结构有利于改善湿度传感器的响应特性。
Through designing optimized ring upper electrode structure and widely used gridiron upper electrode structure,theoretical research and comparison test and analysis are carried out,computing research is carried out using the Looyenga and Dubinin equation.Optimization research on porous structure of upper electrode is carried out,in order to expand the porosity,so as to improve the efficiency of water molecules going through the upper electrode,so as to shorten the response time of capacitive humidity sensor.It is found that the optimized design of ring upper electrode can improve the response characteristics of humidity sensor.
作者
王冰梅
高翔
杨恒祥
禹胜林
WANG Bingmei;GAO Xiang;YANG Hengxiang;YU Shenglin(Jiangsu Meteorological Observation Centre,Nanjing 210009,China;School of Electronic and InformationEngineering,Nanjing University of Information Science and Technology,Nanjing 210044,China)
出处
《传感器与微系统》
CSCD
2020年第5期27-29,共3页
Transducer and Microsystem Technologies
关键词
电容式湿度传感器
上电极
多孔结构优化
数值模拟
capacitive humidity sensor
upper electrode
porous structure optimization
numerical simulation
