摘要
采用旋转喷涂法在Si(100)基片上制备Ni0.25Zn0.15Fe2.6O4(100 nm)铁氧体薄膜作为种子层,然后在种子层上采用射频磁控溅射法沉积Ni0.25Cu0.09Zn0.66Fe1.998O4(600 nm)铁氧体薄膜。研究了种子层对NiZn铁氧体双层膜微观形貌、饱和磁化强度、矫顽力、磁导率及截止频率的影响。结果表明,Ni0.25Zn0.15Fe2.6O4种子层的引入促进了NiZn铁氧体双层膜尖晶石相的晶化和晶粒生长。NiZn铁氧体双层膜的饱和磁化强度Ms为420 kA/m,矫顽力Hc为5.9kA/m,截止频率fr为1.37 GHz,磁导率μ’(300 MHz)高达202。
Ni0.25Zn0.15Fe2.6O4(100 nm) ferrite thin film was deposited as a seed layer on Si(100) substrate by spin spray plating. Then, Ni0.25Cu0.09Zn0.66Fe1.998O4 (600 nm) ferrite thin film was deposited on the seed layer by radio frequency magnetron sputtering. The effects of seed layer on the morphology, saturation magnetization, coercivity, permeability and cut-off frequency of NiZn ferrite bilayer films were investigated. The results show that the Ni0.25Zn0.15Fe2.6O4 seed layer promotes the formation of spinel phase and grain growth of NiZn ferrite bilayer film. The NiZn ferrite bilayer film features a saturation magnetization Ms of 420 kA/m, coercive force Hc of 5.9 kA/m, cut-off frequency fr of 1.37 GHz, and permeability (300 MHz) of as high as 202.
作者
闫妍
孙科
杨长龙
王炜
郭荣迪
蒋晓娜
余忠
兰中文
YAN Yan;SUN Ke;YANG Chang-long;WANG Wei;GUO Rongdi;JIANG Xiao-na;YU Zhong;LAN Zhong-wen(School of Materials and Energy,University of Electronic Science and Technology of China,Chengdu 610054,China;State Grid Shenyang Electric Power Supply Company,Shenyang 110811,China)
出处
《磁性材料及器件》
CAS
CSCD
2020年第3期1-5,共5页
Journal of Magnetic Materials and Devices
基金
国家自然科学基金资助项目(51101028)
国家电网公司科学技术项目(2018YF-26)。
