摘要
为了研究电容式传感器电极表面有微结构对自身灵敏度的影响,设计了一种基于双层微结构电极的电容式压力传感器,其以表面溅射有导电金属的带有金字塔微结构的PDMS薄膜作为上下层电极。该方法设计的传感器能够明显地提高传感器的性能,灵敏度可达0.34 kPa-1,是无微结构电极传感器灵敏度的17倍,具有低的检测极限(最低为20 Pa)、较快的响应时间(200 ms)和可靠的重复性。实验表明,该传感器能够实时快速地的检测外部压力的变化。
In order to explore the influence of the micro⁃structure on the sensitivity of the capacitive sensor electrode surface,a capacitive pressure sensor based on the double⁃layer micro⁃structure electrode was designed.The PDMS thin film with a pyrami⁃dal micro⁃structure sputtering conductive metal on the surface was used as the upper and lower electrode.The sensor designed by this method can obviously improve the performance of the sensor and the sensitivity can reach 0.34 kPa-1,which is 17 times high⁃er than the sensitivity of the sensor without microstructure electrode,with low detection limit(minimum to 20 Pa),fast response time(200 ms)and reliable repeatability.The experiment shows that the sensor can detect the change of external pressure in real time and quickly.
作者
张鹏
陈昱丞
张建
李玉霞
ZHANG Peng;CHEN Yu⁃cheng;ZHANG Jian;LI Yu⁃xia(College of Electrical Engineering and Automation,Shandong University of Science and Technology,Qingdao 266590,China)
出处
《仪表技术与传感器》
CSCD
北大核心
2020年第5期11-13,17,共4页
Instrument Technique and Sensor
