摘要
针对浮雕光栅实际加工的光栅形貌与理论设计形貌存在差异的情况,提出从傅里叶级数的角度去分析光栅结构,探讨光栅傅里叶级数展开式中各空间频率分量对其结构和衍射效率的影响,试图在保证高衍射效率的同时,降低光栅的制备难度。对常见的周期性浮雕光栅进行傅里叶级数展开,减少高频分量,代入仿真软件建模并计算其衍射效率。仿真结果表明:对于矩形光栅,光栅陡直度为46.3°时即可满足最高衍射效率要求;而对于直角三角光栅,光栅陡直度为80.4°并且光刻分辨率不低于300 nm时才可满足最高衍射效率。针对不同结构的浮雕光栅,在满足最高衍射效率时保留的高频含量是不同的,文中提出的分析方法能帮助设计者根据具体的光栅结构,提出加工精度要求,制定具体加工方案,降低加工制备难度。
There are differences in grating profile between the actual processing and the theoretical design of the relief grating. An analysis method based on Fourier series was presented,which could help explore the influence of spatial frequency components on the structure and diffraction efficiency of the grating so as to reduce the difficulty of grating preparation while ensuring high diffraction efficiency. Firstly,Fourier series expansion was performed on common periodic relief gratings to establish the simulation model without the high-frequency components. The simulation results show that for rectangular gratings,the maximum diffraction efficiency could be achieved when the grating steepness was 46.3°,and for the right triangular grating,the grating steepness was 80.4° and the lithography resolution was not less than 300 nm when the diffraction efficiency was satisfied. For the relief gratings with different structures,the number of high-frequency components were different when the highest diffraction efficiency was satisfied. The proposed analysis method could help the designer to propose the processing precision according to the specific grating profile and formulate the specific processing. The program could reduce the difficulty of processing and preparation.
作者
丁闪闪
冯奇斌
鲁婷婷
王梓
吕国强
DING Shanshan;FENG Qibin;LU Tingting;WANG Zi;LYU Guoqiang(School of Electronic Science&Applied Physics,Hefei University of Technology,Hefei 230009,CHN;National Engineering Laboratory of Special Display Technology,National Key Laboratory of Advanced Display Technology,Academy of Photoelectric Technology,Hefei University of Technology,Hefei 230009,CHN;School of Instrumentation and Opto-electronics Engineering,Hefei University of Technology,He-fei 230009,CHN)
出处
《光电子技术》
CAS
北大核心
2020年第2期149-154,共6页
Optoelectronic Technology
基金
安徽省科技重大专项(18030901002)。
关键词
光栅
衍射效率
傅里叶级数
高频分量
陡直度
grating
diffraction efficiency
Fourier series
high frequency component
steepness
