摘要
白光干涉测量是采用具有一定光谱宽度的白光代替单色光作为干涉光源进行测量的特殊干涉测量技术。根据白光干涉信号的相干长度短、相干峰非常明显的特性,采用了垂直扫描干涉测量的方式获取干涉信号。相干峰寻址法是在垂直扫描测量的基础上提出的,具有较高的计算精度和较大的适用性。本文将相干峰寻址法的11种算法分为直接求解法、包络曲线拟合法和加权平均法三类进行阐述,并通过仿真每种算法分析各种算法的优缺点以及适用性和局限性。
White light interferometry is a special interferometry technique that uses white light with a certain spectral width instead of monochromatic light as an interference source.According to the characteristics that the coherence length of the white light interference signal is short and the coherence peak is very obvious,the interference signal is obtained by the vertical scanning interferometry.The coherent peak addressing method is proposed based on the vertical scanning measurement,and has high calculation accuracy and large applicability.In this paper,the 11 algorithms of the coherent peak addressing method are divided into direct solution method,envelope curve fitting method and weighted average method.The advantages and disadvantages of various algorithms,as well as applicability and limitations are analyzed by simulating each algorithm.
作者
汝洪武
张文喜
吴玲玲
RU Hong-wu;ZHANG Wen-xi;WU Ling-ling(School of Optoelectronic Engineering,Xi′an Technoligical University,Xi′an 710021,China;Key Laboratory of Computational Optics Room,Institute of Aerospace Information Innovation,Chinese Academy of Sciences,Beijing 100094,China)
出处
《激光与红外》
CAS
CSCD
北大核心
2020年第8期899-906,共8页
Laser & Infrared
关键词
白光干涉测量
相干峰寻址法
垂直扫描干涉
white light interference
coherent peak addressing method
vertical scanning interference
