摘要
该文通过对双极集成电路产品基准电压源稳定性的分析和调查,简述了基准电压源的原理和影响基准值的因素。通过模拟仿真,确定了接触电阻对电阻值的影响从而影响了基准电压的结果,通过增加软刻蚀工艺及在刻蚀后进行氟化铵和氢氟酸混合腐蚀液清洗的方法,改善了引线孔接触电阻的稳定性、提高了基准电压的一致性,达到了良率提升的目的。
Based on the analysis and investigation of the stability of the reference voltage source for bipolar integrated circuit products,the principle of the reference voltage source and the factors affecting the reference value are briefly described.Through simulation,the influence of contact resistance on the resistance value is determined,thus affecting the result of the reference voltage.By adding soft etching process and cleaning the mixed etching solution of ammonium fluoride and hydrofluoric acid after etching,the method is proposed The stability of the contact resistance is improved,the consistency of the reference voltage is improved,and the yield is improved.
作者
潘国刚
胡玮芳
Pan Guo-gang;Hu Wei-fang(YingRui Simiconductor Co.,Ltd.,Jiangshu Yancheng 224001;College of Information Engineering,Shaoxing Vocational&Technical College,Zhejiang Shaoxing 312000)
出处
《电子质量》
2020年第9期18-21,共4页
Electronics Quality
