摘要
该文提出一种新型声表面波三轴加速度传感器,并对传感器进行了建模和有限元仿真分析,获得了不同加速度载荷下传感器结构的位移和应变分布。该传感器采用四端五梁结构,通过谐振器位置和算法的设计消除了温度漂移对x、y轴向加速度响应的影响,并实现了各轴向加速度的解耦。从理论和仿真上验证了所提出的三轴加速度传感器整体设计的可行性。结果表明,对传感器结构的模态分析为避免实际应用中对传感器的破坏提供了一定的依据。对所设计传感器进行模态分析,求得传感器的固有频率,以规避传感器的共振损伤。
In this paper,a novel triaxial SAW acceleration sensor is proposed.The model of the sensor is established and the finite element simulation is carried out.The displacement and strain distribution of the sensor structure under different acceleration loads are obtained.The sensor design adopts a four-terminal five-beam structure.The influences of temperature drift on the response of x and y axial acceleration sensors are eliminated and the decoupling of each axial acceleration is realized through the design of the resonator position and the algorithm.The feasibility of the overall design of the proposed three-axis acceleration sensor is verified from theory and simulation.The modal analysis of the sensor is carried out to obtain the natural frequency of the sensor to avoid the resonance damage.The results show that the modal analysis of the sensor structure provides a certain basis for avoiding the damage to the sensor in practical application.
作者
郭欣榕
张永威
谭秋林
张文栋
GUO Xinrong;ZHANG Yongwei;TAN Qiulin;ZHANG Wendong(Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China)
出处
《压电与声光》
CAS
北大核心
2020年第5期644-648,共5页
Piezoelectrics & Acoustooptics
基金
国家自然科学基金资助项目(U1837209)。
