摘要
研究了一种石英板夹层窄电极放电装置的低气压直流放电过程,重点探讨了电极结构与电极材料对等离子体参数的影响,其中电极要求宽高为4mm,间距大于40mm。实验采用朗缪尔双探针法诊断,通过改变气压、放电功率等条件分析了电极结构对自制的直流等离子体放电装置的电子密度分布及电子温度的影响。结果表明:通过增加电极表面积,采取特殊的电极结构都可以有效地提高等离子体密度。实验中还发现,随着气压降低,正柱区逐渐缩小、等离子体密度沿电场方向变化趋于平缓,阳极的直流等离子体密度逐渐升高,这时等离子体空间分布均匀度提高,且在16Pa时取得最大值。
In this paper, the low-pressure DC discharge process of a narrow-electrode discharge device with quartz plate interlayer was studied. The influence of electrode structure and material on plasma parameters was discussed. The electrode width is 4 mm and the spacing is more than 40 mm. The experiments were carried out by using the double probe needle method. The influence of electrode structure on the electron density distribution and electron temperature of the home-made DC plasma discharge device was analyzed by changing the pressure and discharge power. The results show that the plasma density can be effectively increased by increasing the surface area of the electrode and adopting special electrode structure. It was also found that with the decrease of air pressure, the positive cylinder area decreases gradually, the plasma density changes gently along the direction of electric field, and the DC plasma density of the anode increases gradually. At this time, the uniformity of plasma spatial distribution increases, and the maximum value is obtained at 16 Pa.
作者
张天一
杨志浩
刘云辉
马玉田
王波
ZHANG Tian-yi;Yang Zhi-hao;LIU Yun-hui;MA Yu-tian;WANG Bo(College of Materials Science and Engineering,Beijing University of Technology,Beijing 100124,China;Department of Mechanical Engineering,Zaozhuang Vocational College of Science and Technology,Tengzhou 277599,China;Institute of Electrical Engineering,Chinese Academy of Sciences,Beijing 100080,China)
出处
《真空》
CAS
2020年第5期61-65,共5页
Vacuum
基金
国家自然科学基金资助的课题(批准号:51571003,11775228)。
关键词
等离子体
直流放电
放电电极
均匀度
电子密度
plasma
DC discharge
discharge electrode
uniformity
electron density
