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基于无线传感器的光学元件表面疵病检测

Detection of optical element surface defects based on wireless sensor
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摘要 受光照影响现有方法得到的光学元件表面疵病检测结果偏差较大,并且检测耗时较长,为提高光学元件检测精度,提出基于无线传感器的光学元件表面疵病检测方法。对光学元件表面疵病特征进行提取,根据提取结果采用极差变换法对受光照散射影响产生的分散数据进行变换,划分数据子集,并计算表面疵病面积。在此基础上,基于无线传感器网络构建疵病定位模型,缩小检测范围,提高检测效率,从而实现对光学元件表面疵病的检测。实验结果表明,该方法在光照条件下能够准确检测出光学元件的表面划痕,检测结果准确性较高,且耗时较短,说明该方法的检测结果具有可靠性。 The detection results of surface defects of optical components obtained by the existing methods affected by light have a large deviation and the detection takes a long time.In order to improve the detection accuracy of optical components,a detection method of surface defects of optical components based on wireless sensors is proposed.The surface defect features of the optical element are extracted.Based on the extraction results,the range transformation method is used to transform the scattered data generated by light scattering,to divide the data subsets,and calculate the surface defect area.On this basis,a defect positioning model is built based on the wireless sensor network to narrow the detection range and improve the detection efficiency,so as to realize the detection of surface defects of optical components.The experimental results show that the method can accurately detect the scratches on the surface of optical element under light conditions.The detection results are highly accurate and time-consuming,which shows that the detection results of the method are reliable.
作者 王振岭 于学斗 李海军 WANG Zhenling;YU Xuedou;LI Haijun(Dezhou University,Dezhou Shandong 253023,China)
机构地区 德州学院
出处 《激光杂志》 北大核心 2020年第10期102-105,共4页 Laser Journal
基金 山东省自然科学基金项目(No.ZR2016FB25) 山东省科技厅课题(No.ZR2016FM37)。
关键词 无线传感器 光学元件 表面疵病 特征提取 极差变换法 wireless sensor optical element surface defect feature extraction range transformation method
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