摘要
为了研究溅射沉积过程中离子注入的辅助强化作用,对硬质合金基体分别进行了N离子氛围下溅射沉积TiC和N离子束辅助沉积TiC,对涂层的硬度、结合强度以及成分进行了检测,结果表明:溅射沉积TiC时进行N离子束辅助可以在硬质合金表面形成较硬涂层,且对溅射沉积涂层的结合强度有良好的增强作用,由于N离子的引入,强化过程中有TiN成分生成。
In order to study the enhancement effect of ion implantation during sputtering deposition,TiC deposition by nitrogen ion sputtering deposition and nitrogen ion beam assisted deposition were carried out on the cemented carbide respectively.The hardness,bonding strength and composition of the coating were tested.The results showed that,nitrogen ion beam assisted sputtering deposition of TiC could form a hard coating on the surface of the cemented carbide,while enhancing the bonding strength of the coating.Due to the introduction of N ions,TiN was generated during the process.
作者
张法光
杜剑平
窦忠宇
丁力
ZHANG Faguang;DU Jianping;DOU Zhongyu;DING Li
出处
《现代机械》
2020年第6期23-25,共3页
Modern Machinery
基金
贵州科学院青年基金(黔科院J合字〔2016〕17号)
贵州省教育厅青年科技人才成长项目(黔教合KY字〔2017〕281)。
关键词
离子束辅助溅射沉积
TIC
硬质合金
ion beam assisted sputtering deposition
TiC
cemented carbide
