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薄膜/涂层材料应力应变关系的压痕法表征与仪器研制 被引量:1

Characterization and the Instrument Development of Stress-Strain Relationship of Film/Coating Materials by Indentation Method
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摘要 本文通过量纲分析、有限元数值模拟计算以及压痕实验研究,系统研究了薄膜/涂层材料应力应变关系的表征方法,成功获得了模量、硬化指数、屈服强度等参数。同时研制了大行程微米尺度压痕仪,完成了仪器结构设计、整体结构和各部件分析、仪器调试和校验等相关工作,最终基于调试成功的仪器进行了典型材料的压痕试验可靠性研究。 In this paper,through dimensional analysis,finite element numerical simulations and indentationexperiments,the characterization method of stress-strain relationship of film/coating materials was systematically studied,andthe parameters were successfully obtained,such as modulus,hardening index and yield strength.At the same time,a largescale micron scale indentation apparatus was developed and the instrument structure design,the overall structure and theanalysis of components,equipment debugging and calibration were accomplished.Finally,the reliability of the indentationtest for typical materials was studied based on this debugged instrument.
作者 王鑫铭 邹伟 陈鑫 马增胜 Wang Xinming;Zou Wei;Chen Xin;Ma Zengsheng(School of Materials Science and Engineering,National-Provincial Laboratory of Special Function Thin Film Materials,Xiangtan University,Xiangtan Hunan 411105,China)
出处 《硬质合金》 CAS 2020年第5期339-344,共6页 Cemented Carbides
基金 国家自然科学基金项目《辐射环境下锂电池电极材料的多变量耦合本构关系与ESM实验表征》(11872054) 湖南省自然科学杰出青年基金项目《极端环境下锂电池电极材料的多变量耦合关系及失效机理研究》(2020JJ2026)。
关键词 压痕法 应力应变关系 薄膜/涂层 可靠性 indentation stress-strain relationship film/coating reliability
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