摘要
为改善以往图案化透镜加工工艺复杂、制造技术昂贵、图案设计方面有限制等缺点,本文将飞秒激光双光子聚合加工技术应用于图案化微透镜的快速、高精度加工。通过球面波因子的变形设计了不同图案的微透镜,利用飞秒激光双光子聚合加工技术在光刻胶样品中加工出图案化的微透镜,然后将光刻胶样品置于显影液中去除未聚合部分,得到图案化微透镜,最后对图案化微透镜进行成像测试和光强均一化分析。将LED光源分别置于不同图案微透镜的下方,光线透过图案化微透镜成功聚焦出光强一致的焦点图案。实验结果表明,使用飞秒激光双光子聚合加工可以实现灵活可控的3D图案化微透镜结构的加工,采用加工功率为7 mW,曝光时间为2 ms,扫描xy步距为0.5μm,z步距为0.8~1.5μm,不仅保证了微透镜结构表面光滑,而且实现了微透镜的快速加工。该技术在加工光学超材料、光学微器件、集成光学器件等方面具有广阔的应用前景。
Two-photon polymerization technology for use in a femtosecond laser was used in the rapid and high-precision processing of a patterned microlens to improve the previous shortcomings,including a complex processing technology,expensive manufacturing technology,and limited pattern design.First,three-dimensional software was used to design the microlens pattern through the deformation of the spherical wave factor,and the two-photon polymerization processing technology for a femtosecond laser was used to process the patterned microlens in the photoresist sample.The sample was then placed in a developer to remove the unprocessed area and obtain the corresponding patterned microlens.Finally,an imaging test and a light intensity homogenization analysis of the patterned microlens were carried out.An LED light source was placed below the patterned microlens,and the light was successfully focused through the patterned microlens to obtain the corresponding patterns with the same light intensity.The experiment shows that the two-photon polymerization of a femtosecond laser can realize the flexible and controllable processing of a 3D microlens structure,a processing power of 7 mW,an exposure time of 2 ms,a scanning xy-step of 0.5μm,and a z-step of 0.8-1.5μm,ensuring the smooth surface of the microlens structure and realizing a rapid microlens processing.The two-photon polymerization technology for a femtosecond laser will play an important role in the processing field such as optical metamaterials,optical microdevices,and integrated optical devices.
作者
苏亚辉
秦天天
许兵
吴东
SU Ya-hui;QIN Tian-tian;XU Bing;WU Dong(School of Electrical Engineering and Automation,Anhui University,Hefei 230601,China;School of Electronic Information Engineering,Anhui University,Hefei 230601,China;Anhui Provincial Laboratory of Information Materials and Intelligent Perception,Hefei 230601,China;Department of Precision Machinery and Precision Instrumentation,University of Science and Technology of China,Hefei 230022,China)
出处
《光学精密工程》
EI
CAS
CSCD
北大核心
2020年第12期2629-2635,共7页
Optics and Precision Engineering
基金
安徽省高等教育学校自然科学基金重点项目(No.KJ2018A014)
中国博士后科学基金会资助项目(No.2019M662190)
中央高校基础研究经费资助项目(No.WK2090000016)。
关键词
激光加工
飞秒激光
双光子聚合
微透镜
光刻胶
laser fabrication
femtosecond laser
two-photon polymerization
microlens
photoresist
