摘要
针对隐身等多类高价值目标精确探测与识别以及探测技术持续发展需求,为实现复杂战场环境下的高概率真假目标识别和高精度目标检测、定位、跟踪,开展复杂战场环境下隐身及微弱特征目标探测及抗干扰探测等技术研究意义重大,其中高集成度的焦平面型偏振红外探测器技术是其中一个重要方向。围绕集成式中波(MW)256×256碲镉汞红外偏振焦平面探测器的研制,介绍了偏振结构的设计、制备到偏振探测器的集成,以及偏振探测器性能的测试等方面的研究进展状况,设计加工出了亚波长金属光栅阵列,采用倒装互连的方式实现了偏振探测器的集成,并在MW 256×256碲镉汞焦平面器件上实现了红外偏振性能的测试和评估。
In order to meet the needs of accurately detecting and recognizing many kinds of high-value targets(such as stealth),the continuous development of detection technology,and realizing high probability true or false target recognition and high precision target detection,location and tracking in complex battlefield environment,it is of great significance to research stealth and weak feature target detection and anti-jamming detection in complex battlefield environment,the high integration of polarization focal plane infrared detector technology is one of the important direction.Focusing on the development of an integrated MW 256×256 HgCdTe polarization focal plane infrared detector,the research progress from the integration of polarization detectors to design and preparation of polarization structures were introduced,as well as the performance testing of polarization detector.A subwavelength metal grating array was designed and fabricated,the polarization detector was integrated by flip chip,and the infrared polarization performance was tested and evaluated on MW256×256 HgCdTe focal plane device.
作者
杨超伟
封远庆
李东升
李宁
赵永强
舒畅
辛永刚
李永亮
左大凡
唐遥
Yang Chaowei;Feng Yuanqing;Li Dongsheng;Li Ning;Zhao Yongqiang;Shu Chang;Xin Yonggang;Li Yongliang;Zuo Dafan;Tan Yao(Kunming Institute of Physics,Kunming 650223,China;College of Automation,Northwestern Polytechnical University,Xi’an 710072,China)
出处
《红外与激光工程》
EI
CSCD
北大核心
2021年第1期58-62,共5页
Infrared and Laser Engineering
关键词
碲镉汞
红外焦平面探测器
偏振
mercury cadmium telluride
infrared focal plane detector
polarization
