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一种基于连续相位优化的三维形貌测量方法 被引量:1

Method of 3D morphology measurement based on continuous phase optimization
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摘要 相位解包裹是光学三维测量中获得连续相位分布的重要环节之一,断截相位解包裹结果的好坏会对测量精度产生重要的影响。针对已有的相位解包裹算法在解包裹后得到的连续相位波动幅度较大,不能对存在严重欠采样和较强噪声的包裹相位进行精确解包裹,从降低连续相位波动幅度和防止相位差出现突增突减现象的角度出发,提出一种基于四步相移法对连续相位逐一分段式斜率矫正的新型处理方法。仿真结果表明,该方法不仅提高了三维还原图的精度,还提升了三维形貌图的稳定性。该方法在处理三维图像问题时使其误差率降低了10.12%,具有一定的实用价值。 The phase unwrapping is one of the key steps to obtain continuous phase distribution in optical 3D measurement.The unwrapping results of the truncated phase may have an important impact on the accuracy of the measurement.Due to the large fluctuation range of continuous phase obtained after being unwrapped by the existing phase unwrapping algorithms,the unwrapping phase with serious undersampling and high noise cannot be accurately unwrapped.In order to reduce the fluctuation amplitude of continuous phase and prevent the phase difference from sharply increasing and decreasing,a new processing method for one⁃by⁃one piecewise slope correction of continuous phase is proposed based on four⁃step phase shift method.Simulation results show that the proposed method can improve not only the accuracy of 3D restoration map,but also the stability of 3D morphology map.It can reduce the error rate by 10.12%when dealing with 3D images,and has a certain practical value.
作者 李辰 刘建明 何晴 LI Chen;LIU Jianming;HE Qing(School of Electronic Engineering and Automation,Guilin University of Electronic Technology,Guilin 541004,China)
出处 《现代电子技术》 2021年第5期61-65,共5页 Modern Electronics Technique
基金 国家自然科学基金(61262074)。
关键词 三维形貌测量 连续相位优化 相位解包裹 斜率矫正 光栅投影 连续相位矫正 3D morphology measurement continuous phase optimization phase unwrapping slope correction optical grating projection continuous phase correction
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